?How Clean Is Clean?Defining Acceptable Cleanliness Levels.
如何清洗才能潔凈？定義可接受的清潔度水平
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Overview?概述
??????????Why monitor cleanliness?為什么要檢測(cè)潔凈度？
??????????Types of contamination?污染類型
??????????Types of cleanliness measurement methods潔凈度檢測(cè)方法類型
??????????Most common verification/measurement methods最常用的確認(rèn)/測(cè)量方法
??????????Criteria for selecting a cleanliness monitoring method選擇清洗監(jiān)測(cè)方法標(biāo)準(zhǔn)
??????????Cost impact of cleanliness level清潔度水平的成本影響
??????????Suggested approaches to defining acceptable limits?推薦的定義合適限值的方法
??????????Example of defining acceptable limits定義標(biāo)準(zhǔn)限值示例
??????????Summary?總結(jié)
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Why Monitor Cleanliness
為什么監(jiān)測(cè)清潔度
??????????Establish benchmark?建立基準(zhǔn)點(diǎn)
??????????Optimize cleaning process優(yōu)化清洗流程
??????????Maintain process control?維護(hù)工藝控制
??????????Know if cleanliness is a problem?知道清潔度是否是一個(gè)問(wèn)題
??????????Ensure product quality?保證產(chǎn)品質(zhì)量
??????????Contamination degrades performance污染降低性能
??????????Varying number of parts cleaned部件清洗數(shù)量不同
??????????Varying degree of contamination污染程度不同
??????????Detect problems sooner檢測(cè)問(wèn)題較快
??????????Prevent downstream problems?預(yù)防下游問(wèn)題?????
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Types Of Contamination
污染類型
??????????Particulate微粒
???????????Thin film or molecular薄膜或者分子
???????????Microbial?微生物
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Types Of Cleanliness Measurement Methods
潔凈度測(cè)量方法類型
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Indirect間接方式
??Any technique that does not take a measurement from the actual surface or area of interest & does not identify Species
任何非實(shí)物表面或者需檢測(cè)區(qū)域的測(cè)量及不辨識(shí)種類的技術(shù)
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Direct直接方法
??Any technique that takes a measurement from the actual surface or area of interest & does not identify species
任何從實(shí)物表面或者需檢測(cè)區(qū)域的測(cè)量及不辨識(shí)種類的技術(shù)
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Analytical?分析
??Any technique that identifies the species and measures the amount of contamination. Analytical method may be direct or indirect
任何辨別種類和測(cè)量污染數(shù)量的技術(shù)；分析方法可以是直接或者間接的；
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“Ideal” Cleanliness Measurement Method
理想的清潔度測(cè)量方法
??????????Quantitative?定量
??????????Non-contact??非接觸式
??????????Non-destructive?無(wú)損害
??????????Direct?直接
??????????Fast measurement?快速檢測(cè)
??????????Large area as well small area?大、小區(qū)域均可
??????????Easy to operate?易操作
??????????Low skill level for operation?操作技術(shù)容易
??????????Low acquisition and operating cost?購(gòu)買和運(yùn)行成本低
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Indirect And Direct Methods
間接和直接方法
??????????Non volatile residue (NVR)無(wú)揮發(fā)性殘余
??????????Ultraviolet (UV) spectroscopy紫外線光譜
??????????Optical particle counter (OPC)光學(xué)粒子計(jì)數(shù)器
??????????Magnified visual inspection?放大外觀檢測(cè)
??????????Black light?不可見(jiàn)光
??????????Water break test?水膜破散測(cè)試
??????????Contact angle?接觸角度
??????????Optically stimulated electron emission (OSEE)光學(xué)受激電子發(fā)射
??????????Measurement of evaporative rate analysis (MESERAN)蒸發(fā)率分析測(cè)量
??????????Total organic carbon (TOC)總有機(jī)碳
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Analytical Methods
分析方法
??????????Auger electron spectroscopy (AES)/scanning auger microscopy (SAM)奧格電子光譜學(xué)/掃描奧格電子顯微鏡
??????????Energy Dispersive x-ray (EDX)/wavelength Dispersive x-ray (WDX)能量色散X-射線分析/波長(zhǎng)色散X-射線分析?
??????????Electron spectroscopy for chemical analysis (ESCA/XPS)電子頻譜化學(xué)分析
??????????Dynamic secondary ion mass spectroscopy (dynamic SIMS)動(dòng)態(tài)二級(jí)粒子質(zhì)譜分析
??????????Static secondary ion mass spectroscopy (static SIMS) or TOF-SIMS靜態(tài)二級(jí)粒子質(zhì)譜分析
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? Scanning electron microscopy (SEM)
??????????掃描電子顯微鏡檢查法
? Fourier transform infrared spectroscopy (FTIR)
??????????傅里葉變換紅外光譜學(xué)
??????????Attenuated total reflectance Fourier transform infrared spectroscopy (ATR FTIR)衰減全反射比傅立葉變換紅外光譜分析
??????????Raman spectroscopy (RS)拉曼光譜分析
??????????X-ray fluorescence (XRF)X射線熒光分析